VPO-1

YES Vapor Prime Oven

Nanofabrication Facility

MAKE

YES

MODEL

LP-III

LOCATION

Cleanroom G07 LISE

The Yes vapor prime oven is used to apply a monolayer of HMDS to increase the adhesion of Resist on to the substrate. Wafers are dehydrated through several cycles of heating and purging the chamber.

Can be used with samples up to 6″.

Contact staff for training information.

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