Woollam Spectroscopic Ellipsometer
Cleanroom G07 LISE
Equipment description and usage:
Woollam V-VASE32 vertical angle spectroscopic ellipsomer is used for non-invasive characterizing of multilayer film thickness, optical constants, film composition, crystallinity, surface and interface roughness, anisotropy, birefringence, bandgap and electronic transitions. The spectral range of system covers from 193 to 1700 nm. Incident angle can be automatically adjusted from 20° – 70°. The system also equipped with Auto-Retarder for high accuracy and depolarization, anisotropy, or Mueller-Matrix measurement.