RIE-5

Technics Plasma Stripper/Cleaner

Nanofabrication Facility

MAKE

Technics

MODEL

220

LOCATION

Cleanroom G07 LISE

The Technics is a rf plasma reactor and equipped with stainless steel reactor, 500 watt, 13.56 MHz RF generator, and two gas supplies, O2 and CF4. With a stainless steel plate and a wafer boat, the Technics is able to process any size of samples that are smaller than 6″ in diameter. When used with the optional Faraday Cage, the substrates are totally protected from ionic bombardment.

 

Applications:

Photoresist stripping, surface cleaning, and O2 plasma surface treatment on Si or other substrates such as GaAs, ceramic, metal, plastic, and glass.

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