Sharon Thermal Evaporator TE-5
Cleanroom G07 LISE
Equipment description and usage:
SHARON TE-5 is a three-source thermal evaporation system for depositing thin films by resistive heating. The three thermal sources are controlled by a 2.5-kW power supply, suitable for sequential deposition. Film thickness is monitored in-situ by a quartz crystal monitor. The base pressure of system can reach 10E-7 torr range pumped by cryo and oil-free roughing pumps. This system is a rapid turn-around machine with a typical pump down time of ~60 minutes and evaporation times of several minutes, dependent on material. This system is currently set up for general metal deposition (Ti, Cr, Ni, Pd, Pt, Ag, Au, Al, Ge).