Sharon Thermal Evaporator TE-3
Cleanroom G07 LISE
SHARON TE-3 is a four-source thermal evaporation system with one 2.5-kW power supply for sequential resistive-heated deposition. Film thickness is monitored in-situ by a quartz crystal monitor. A cryopump, backed by an oil-free roughing pump, enables base pressures down to the 10E-7 torr range. This system is a rapid turn-around machine with a typical pump down time of ~1 hour and evaporation times of several minutes. This system is currently set up for metal deposition, in particular for metal contacts. Cr, Au, Ti, Pt, Pd, Cu, Ag, and Al are the metals allowed in the system.