RIE-4

Samco UV & Ozone Stripper

Nanofabrication Facility

MAKE

Samco

MODEL

UV-1

LOCATION

Cleanroom G07 LISE

The Samco UV-Ozone cleaner uses atomic oxygen, produced via the decomposition of ozone, to remove organic materials from substrates. It can accommodate up to 150 mm diameter samples, with a maximum substrate thickness of 10 mm. The system can effect ozone decomposition by either UV light or thermal energy. The system can also be used as a high-intensity UV-lamp system without ozone generation.

Training is offered on an on-demand basis, contact
shickman_at_cns.fas.harvard.edu
for more information.

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