RCA Clean Wet Process Station

Nanofabrication Facility


Reynolds Tech




Cleanroom G07 LISE

AB-2 is a Reynolds Tech RCA clean wet process station located in the Wet Process Bay of the Center for Nanoscale Systems cleanroom. All water supplied to this bench is 18 Mohm deionized water. An ergonomic, anti-static, chemical spill mat is located in front of AB-2. The bench features a 70C SC-1 bath, a 70C SC-2 bath and 25C DHF bath; each bath has an associated dump rinser and a there is a global plenum rinse. Bench top processing is permitted at this bench when the RCA clean tanks are not in use. There is a gooseneck sink, DI spray guns, aspirator and N2 drying guns. The touch screen interface allows for user control of dump rinser and aspirator timers, as well as displaying warnings, alarms and error codes. Acids and bases are stocked beneath this bench for general use.

For training on this and all wet stations, sign-up at the Center for Nanoscale Systems training events web site.