MS-16

Olympus Optical Microscope (Photo-Bay)

Nanofabrication Facility

MAKE

Olympus

MODEL

BX51M

LOCATION

Cleanroom G07 LISE

The Olympus BX51 optical microscope provides reflection and transmission mode imaging for photo-mask and back side inspection using objective lenses with 5x to 100x magnification and a Motic high definition digital camera for image capture and storage. The light sources contain UV filters and various contrast enhancing filters are available.

Contact staff for training information.

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