MS-24

Nikon Optiphot 66 Optical Inspection Scope

Nanofabrication Facility

MAKE

Nikon

MODEL

Optiphot 66

LOCATION

Cleanroom G07 LISE

The Nikon Optiphot 66 optical microscope provides reflection and transmission mode imaging for photo-mask and back side inspection using objective lenses with 2.5x to 100x magnification and a Infinity 1 high definition digital camera for image capture and storage. The light sources contain UV filters and various contrast enhancing filters are available.

Contact staff for training information.

Logins

doubleArrow-right