PL-4

KLA-Tencor P-16+ Contact Stylus Profiler

NanoMaterials Facility

MAKE

KLA-Tencor

MODEL

P-16+

LOCATION

G06 LISE

The KLA-Tencor P-16+ is a contact stylus-type surface profiler, which is capable of being utilized in a wide range of applications. It delivers automated step height, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials, including soft materials like polydimethylsiloxane (PDMS). It uses a diamond stylus for advanced profiling applications on a Windows XP operating system. It has a Microhead with an extended vertical range of 1 mm, stylus force as low as 0.5 mg, and extended scan length of 200mm. P-16+ offers top and side view optics, allowing the operator to automatically switch between a top-down view for fast stylus positioning and navigating over the sample, and an angled view for easy monitoring of the stylus as it scans over target features.

Contact staff for training information.

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