Key High Thermal Evaporator
Key High Vacuum
Cleanroom G07 LISE
Equipment description and usage:
Key High Vacuum TE-1 is a three-source thermal evaporation system for sequentially depositing thin films by resistive heating. Film thickness is monitored by a quartz crystal monitor. Base pressures down to 2e-7 torr are achievable by cryo and oil-free roughing pumps. General purpose.
This tool is currently set up for general material depositions. Please contact staff-in-charge or primary user for the materials allowed in this system.
* Three thermal source pockets and one power supply capable of sequential thin film deposition
* Quartz crystal monitor for closed loop thickness control
* Cryopump, base pressure down to ~ 10E-7 torr