TE-1

Key High Thermal Evaporator

Nanofabrication Facility

MAKE

Key High Vacuum

MODEL

N/A

LOCATION

Cleanroom G07 LISE

Equipment description and usage:
Key High Vacuum TE-1 is a three-source thermal evaporation system for sequentially depositing thin films by resistive heating. Film thickness is monitored by a quartz crystal monitor. Base pressures down to 2e-7 torr are achievable by cryo and oil-free roughing pumps. General purpose.

Applications:
This tool is currently set up for general material depositions. Please contact staff-in-charge or primary user for the materials allowed in this system.

Features:
* Three thermal source pockets and one power supply capable of sequential thin film deposition
* Quartz crystal monitor for closed loop thickness control
* Cryopump, base pressure down to ~ 10E-7 torr

Contact staff for training information.

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