SEM-8

FESEM Ultra Plus

Imaging and Analysis

MAKE

Zeiss

MODEL

Ultra Plus

LOCATION

B20B LISE

The Ultra Plus Field Emission Scanning Electron Microscope (FESEM) enables high resolution surface examination. A side-mounted air-lock enables faster sample loading than on our other FESEMs. This SEM has a cross-over free Zeiss Gemini column, and uses a low to moderate energy (0.1 to 30 keV) electron beam to image a sample in high vacuum with resolution of 1 nm at 15 keV and 1.7 nm at 1 keV. Detectors available: In-lens SE, Everhart-Thornley, EsB (Energy selective Backscattered electron) detector and STEM (Scanning Transmission Electron detector). The Ultra Plus also has a Charge Compensation (CC) system which places a gas needle close to the sample for localized gas (N2) injection to reduce charging.

Our FESEM training procedure comprises three parts: an online course, a hands-on training and a certification. The online training can be accessed by users with a Harvard Key here [https://trainingportal.harvard.edu/Saba/Web_spf/NA1PRD0068/common/ledetail/cours000000000007001] (non-Harvard users without a Harvard Key should contact us [info@cns.fas.harvard.edu] for assistance). Please contact staff for more details on our SEM training program.

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