SEM-5

FESEM Supra55VP

Imaging and Analysis

MAKE

Zeiss

MODEL

Supra55VP

LOCATION

B15I LISE

The Supra55VP Field Emission Scanning Electron Microscope (FESEM) allows surface examination down to nanometer scales in either high vacuum or in Variable Pressure (VP) mode. This SEM has a cross-over free Zeiss Gemini column, and uses a low to moderate energy (0.1 to 30 keV) electron beam to image a sample with resolution of 1 nm at 15 keV in high vacuum or 2 nm at 30 keV in VP mode. Available detectors include In-lens SE, Everhart-Thornley SE, VPSE, 4-quadrant BSE, and STEM. The Supra55VP has an Energy Dispersive x-ray Spectrometer (EDS) for elemental analysis and mapping and an Electron BackScattered Diffraction (EBSD) system for phase identification, crystal orientation and phase mapping using Kikuchi patterns.

Our FESEM training procedure comprises three parts: an online course, a hands-on training and a certification. The online training can be accessed by users with a Harvard Key here [https://trainingportal.harvard.edu/Saba/Web_spf/NA1PRD0068/common/ledetail/cours000000000007001] (non-Harvard users without a Harvard Key should contact us [info@cns.fas.harvard.edu] for assistance). Please contact staff for more details on our SEM training program.

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