FEI Helios 660
Imaging and Analysis
The FEI Helios 660 focused ion beam and scanning electron microscope is available to perform direct etching and milling of patterns. This tool enables rapid preparation of thin samples for TEM and needles for atom probe tomography. In addition, metal or oxide pattern deposition can be performed. An Omniprobe mechanical probe permits the lift-out of TEM and Atom Probe specimens. The SEM has both normal and immersion modes available, for high-resolution SE and BSE imaging, and is equipped with a dedicated BSE detector for observation at 0 degrees. There is also an insertable STEM detector for transmission imaging. This instrument is equipped with EDAX EDS and EBSD systems.