SB-07

Electron Beam Resist Spin Coating Station

Nanofabrication Facility

MAKE

Reynolds Tech

MODEL

FWS 72SS

LOCATION

Cleanroom G07 LISE

SB-07 is a Reynolds Tech general purpose work station for electron beam resist spin coating located in the e-beam Lithography Bay of the Center for Nanoscale Systems cleanroom. An ergonomic, anti-static, chemical spill mat is located in front of SB-6. The bench features two Headway Research spin coaters/controllers, various spinner chuck sizes for pieces through 6″/150mm wafers, two Torrey Pines hot plates, N2 drying guns and a photoresist/solvent disposal drains. The touch screen interface displays warnings, alarms and error codes. Photoresists are stocked beneath this bench for general use.

For a complete list of chemicals, required personal protective equipment and materials restrictions associated with this wet station, please contact Yuan Lu for more information. For training on this and all wet stations, sign-up at the Center for Nanoscale Systems training events web site.

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