SB-06

Electron Beam Resist Developing Station

Nanofabrication Facility

MAKE

Reynolds Tech

MODEL

FWS 72SS

LOCATION

Cleanroom G07 LISE

SB-06 is a Reynolds Tech general purpose work station for electron beam resist developing located in the E-Beam Lithography Bay of the Center for Nanoscale Systems cleanroom. An ergonomic, anti-static, chemical spill mat is located in front of SB-7. The bench features a VWR shaker plate, a VWR stirring plate, gooseneck sinks, DI spray guns, N2 drying guns and solvent disposal drains. The touch screen interface displays warnings, alarms and error codes. Solvents are stocked beneath this bench for general use.

For a complete list of chemicals, required personal protective equipment and materials restrictions associated with this wet station, please contact Yuan Lu for more information. For training on this and all wet stations, sign-up at the Center for Nanoscale Systems training events web site.

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