Electron Beam Resist Developing Station
Cleanroom G07 LISE
SB-06 is a Reynolds Tech general purpose work station for electron beam resist developing located in the E-Beam Lithography Bay of the Center for Nanoscale Systems cleanroom. An ergonomic, anti-static, chemical spill mat is located in front of SB-7. The bench features a VWR shaker plate, a VWR stirring plate, gooseneck sinks, DI spray guns, N2 drying guns and solvent disposal drains. The touch screen interface displays warnings, alarms and error codes. Solvents are stocked beneath this bench for general use.