MET-2

CDE ResMap-178

Nanofabrication Facility

MAKE

CDE Inc.

MODEL

ResMap 178

LOCATION

Cleanroom G07 LISE

CDE 4 point probe (4pp) ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). As a commonly used metrology unit in nanofabrication processes to characterize the thin film electrical properties, the tools capabilities include:
1) Sample size: 10mm to 150mm in diameter
2) Measurement range, 5mΩ to 5 MΩ
3) Accuracy: within 1%
4) Software: easy to use, mapping capability (2D and 3D contour)
5) Fast measurement and easy operation

Contact staff for training information.

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