PL-6

CCI HD Optical Profiler

Nanofabrication Facility

MAKE

Taylor Hobson

MODEL

CCI HD

LOCATION

Cleanroom G07 LISE

This advanced optical profiler uses Coherence Correlation Interferometry (CCI) to generate high resolution 3D non contact surface measurements. The Taylor Hobson CCI optical profiler system uses technology capable of providing surface roughness and step-height measurements with sub-nanometer precision. A useful extension to the CCI is the ability to easily measure films thicker than 1.5 ยตm, but thinner films are difficult to measure.

A solution to the thickness limitation is the Helical Complex Field (HCF) function. The ability to obtain sub-nanometer vertical resolution and sub-micron lateral resolution allows rapid, non-destructive, and highly repeatable measurements of metal, polymer, and semiconductor thin films serving a variety of applications involving solar PV, MEMS, optics, and coatings technology.

Contact staff for training information.

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