Anatech Barrel Plasma System
Cleanroom G07 LISE
The Anatech 106 oxygen plasma barrel asher is a useful tool for quickly removing thin layers of organic contamination. It is useful as a final clean after a wet-chemical photoresist removal, or as a “de-scum” process before a deposition process. The tool can accommodate up to 150 mm diameter substrates. The tool is nearly completely automated, with a touch-screen control panel. Maximum RF power is 300 watts, maximum O2 flow rate of 100 SCCM.