RIE-9

Anatech Barrel Plasma System

Nanofabrication Facility

MAKE

Anatech LTD

MODEL

SCE 106

LOCATION

Cleanroom G07 LISE

The Anatech 106 oxygen plasma barrel asher is a useful tool for quickly removing thin layers of organic contamination. It is useful as a final clean after a wet-chemical photoresist removal, or as a “de-scum” process before a deposition process. The tool can accommodate up to 150 mm diameter substrates. The tool is nearly completely automated, with a touch-screen control panel. Maximum RF power is 300 watts, maximum O2 flow rate of 100 SCCM.

Training is offered most weeks, in conjunction with training on the technics plasma system. Sign up is on the online training webpage.

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